Invention Grant
- Patent Title: Ferroelectric device based on hafnium zirconate and method of fabricating the same
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Application No.: US17650154Application Date: 2022-02-07
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Publication No.: US11968841B2Publication Date: 2024-04-23
- Inventor: Mihaela Ioana Popovici , Amey Mahadev Walke , Jan Van Houdt
- Applicant: IMEC vzw
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP 155738 2021.02.08
- Main IPC: H10B53/30
- IPC: H10B53/30 ; H01L29/78 ; H01L49/02

Abstract:
A ferroelectric device, for instance, a metal-ferroelectric-metal (MFM) capacitor, a ferroelectric random access memory (Fe-RAM), or a ferroelectric field effect transistor (FeFET), is provided. In one aspect, the ferroelectric device is based on hafnium zirconate (HZO). The ferroelectric device can include a first electrode and a second electrode, and a doped HZO layer, which is arranged between the first electrode and the second electrode. The doped HZO layer can include a ferroelectric layer and at least two non-zero remnant polarization charge states. The doped HZO layer can be doped with at least two different elements selected from the lanthanide series, or with a combination of at least one element selected from the lanthanide series and at least one rare earth element.
Public/Granted literature
- US20220254795A1 FERROELECTRIC DEVICE BASED ON HAFNIUM ZIRCONATE AND METHOD OF FABRICATING THE SAME Public/Granted day:2022-08-11
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