- 专利标题: Backside metal formation methods and systems
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申请号: US16254904申请日: 2019-01-23
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公开(公告)号: US11987874B2公开(公告)日: 2024-05-21
- 发明人: Michael J. Seddon
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Adam R. Stephenson, LTD.
- 主分类号: C23C14/18
- IPC分类号: C23C14/18 ; C23C14/24 ; C23C14/58
摘要:
Implementations of methods of forming a metal layer on a semiconductor wafer may include: placing a semiconductor wafer into an evaporator dome and adding a material to a crucible located a predetermined distance from the semiconductor wafer. The semiconductor wafer may include an average thickness of less than 39 microns. The method may also include heating the material in the crucible to a vapor and depositing the material on a second side of the semiconductor wafer.
公开/授权文献
- US20200232086A1 BACKSIDE METAL FORMATION METHODS AND SYSTEMS 公开/授权日:2020-07-23
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