Invention Grant
- Patent Title: Faceplate tensioning method and apparatus to prevent droop
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Application No.: US17365727Application Date: 2021-07-01
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Publication No.: US12011731B2Publication Date: 2024-06-18
- Inventor: Yao-Hung Yang , Shantanu Rajiv Gadgil , Tanmay Pramod Gurjar , Sudhir R. Gondhalekar
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboa
- Main IPC: B05B15/18
- IPC: B05B15/18 ; B05B1/18 ; C23C16/455
Abstract:
Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.
Public/Granted literature
- US20220008946A1 FACEPLATE TENSIONING METHOD AND APPARATUS TO PREVENT DROOP Public/Granted day:2022-01-13
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