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    Seal for an assembly in a vapor deposition chamber
    1.
    外观设计
    Seal for an assembly in a vapor deposition chamber 有权

    公开(公告)号：USD1027120S1

    公开(公告)日：2024-05-14

    申请号：US29762536

    申请日：2020-12-17

    Applicant: Applied Materials, Inc.

    Designer： Yao-Hung Yang ,  Eric Ruhland ,  Saurabh M. Chaudhari ,  Dien-Yeh Wu ,  Philip Wayne Nagle ,  Aniruddha Pal ,  Sudhir R. Gondhalekar ,  Siamak Salimian ,  Scott Lin ,  Boon Sen Chan

    Abstract: FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.
    FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.
    FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
    FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.
    FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
    FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.
    FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.
    FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.
    FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.
    FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,
    FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).
    The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.

    Substrate support bushing
    2.
    发明授权
    Substrate support bushing 有权
    基板支撑衬套

    公开(公告)号：US08911151B2

    公开(公告)日：2014-12-16

    申请号：US13648082

    申请日：2012-10-09

    Applicant: Applied Materials, Inc.

    Inventor： Tao Hou ,  Jeonghoon Oh ,  Tom K. Cho ,  Andrzej Matlosz ,  Frank F. Hooshdaran ,  Yao-Hung Yang

    IPC: F16C29/02 ,  C23C16/458 ,  C23C16/505 ,  H01L21/687

    CPC classification number: C23C16/4586 ,  C23C16/505 ,  F16C29/02 ,  H01L21/68742

    Abstract: A bushing assembly for supporting a substrate within a processing chamber is generally provided. In one aspect, the bushing assembly comprises a tubular body having an outer perimeter and an aperture extending therethrough, a first ring having a first inner edge, the first ring disposed in the aperture in an upper portion of the tubular body, and a second ring having a second inner edge, the second ring disposed in the aperture in a lower portion of the tubular body. In another aspect, the first inner edge has a first radius of curvature, and the second inner edge has a second radius of curvature. In another aspect, a first inner edge diameter, a second inner edge diameter, the first radius of curvature, and the second radius of curvature are selected such that a support pin extending through the aperture contacts the bushing assembly on at most two points.

    Abstract translation: 通常提供用于在处理室内支撑衬底的衬套组件。 在一个方面，套管组件包括具有外周边和延伸穿过其的孔的管状体，第一环具有第一内边缘，第一环设置在管状体的上部中的孔中，第二环 具有第二内边缘，所述第二环设置在所述管状体的下部中的所述孔中。 在另一方面，第一内边缘具有第一曲率半径，并且第二内边缘具有第二曲率半径。 在另一方面，选择第一内边缘直径，第二内边缘直径，第一曲率半径和第二曲率半径，使得延伸穿过孔的支撑销在最多两点处接触衬套组件。

    CLAMPED DUAL-CHANNEL SHOWERHEAD
    6.
    发明申请
    CLAMPED DUAL-CHANNEL SHOWERHEAD 有权

    公开(公告)号：US20230064637A1

    公开(公告)日：2023-03-02

    申请号：US17893430

    申请日：2022-08-23

    Applicant: Applied Materials, Inc.

    Inventor： Kiran Shyam Honnavar ,  Srikantha Raju ,  Gangadhar Sheelavant ,  Aniruddha Pal ,  Yao-Hung Yang ,  Basavaraja Shankarappa Kengunti

    IPC: H01J37/32 ,  B05B1/00 ,  B05B1/18 ,  C23C16/455 ,  C23C16/50

    Abstract: Exemplary dual-channel showerheads may include an upper plate that defines a first plurality of apertures. The showerheads may include a base having a lower plate. The lower plate may define a second plurality of apertures and a third plurality of apertures. Each of the first plurality of apertures may be fluidly coupled with a respective one of the second plurality of apertures to define a fluid path extending from a top surface of the showerhead through a bottom surface of the showerhead. The base may define a gas inlet that is fluidly coupled with the third plurality of apertures. The base may be detachably coupled with the upper plate using one or more fastening mechanisms. The showerheads may include a compressible gasket positioned between the upper plate and the lower plate.

    Sealing member with lip seal
    7.
    发明授权
    Sealing member with lip seal 有权

    公开(公告)号：US12209663B2

    公开(公告)日：2025-01-28

    申请号：US18215604

    申请日：2023-06-28

    Applicant: Applied Materials, Inc.

    Inventor： Yao-Hung Yang ,  Chih-Yang Chang ,  Sam Hyungsam Kim

    IPC: F16J15/06 ,  F16J15/02 ,  F16J15/10

    Abstract: A sealing member includes a monolithic body including a first portion adjoining a second portion. The first portion forms part of a circle. The second portion includes first and second lobes. Each lobe adjoins the first portion with a concave surface. In one example, each lobe includes a rounded tip, and a convex surface extends from one rounded tip to the other rounded tip.

    Part-life estimation utilizing feature metrology
    9.
    发明授权
    Part-life estimation utilizing feature metrology 有权

    公开(公告)号：US11532466B2

    公开(公告)日：2022-12-20

    申请号：US16933922

    申请日：2020-07-20

    Applicant: Applied Materials, Inc.

    Inventor： Chien-Min Liao ,  Yao-Hung Yang ,  Tom K. Cho ,  Siamak Salimian ,  Hsiu Yang ,  Chun-Chung Chen

    IPC: H01J37/32

    Abstract: Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

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