发明授权
- 专利标题: Sensor apparatus
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申请号: US17306730申请日: 2021-05-03
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公开(公告)号: US12019051B2公开(公告)日: 2024-06-25
- 发明人: Kyohei Kobayashi
- 申请人: KYOCERA CORPORATION
- 申请人地址: JP Kyoto
- 专利权人: KYOCERA CORPORATION
- 当前专利权人: KYOCERA CORPORATION
- 当前专利权人地址: JP Kyoto
- 代理机构: Duane Morris LLP
- 优先权: JP 14221286 2014.10.30
- 主分类号: G01N29/24
- IPC分类号: G01N29/24 ; G01N29/02 ; G01N29/22 ; H03H9/145
摘要:
A sensor apparatus includes: an element substrate; a detecting section disposed on an upper surface of the element substrate, the detecting section including a reaction section having an immobilization film to detect an analyte; a first IDT electrode configured to generate an acoustic wave which propagates toward the reaction section, and a second IDT electrode configured to receive the acoustic wave which has passed through the reaction section; and a protective film located on the upper surface of the element substrate so as to cover the first IDT electrode, the second IDT electrode, and at least part of the immobilization film, the protective film extending between and contacting with the immobilization film and at least one of the first IDT electrode and the second IDT electrode.
公开/授权文献
- US20210270781A1 SENSOR APPARATUS 公开/授权日:2021-09-02
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