Invention Grant
- Patent Title: Structure including resistor network for back biasing FET stack
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Application No.: US17643567Application Date: 2021-12-09
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Publication No.: US12028053B2Publication Date: 2024-07-02
- Inventor: Steven M. Shank , Yves T. Ngu , Michael J. Zierak , Siva P. Adusumilli
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H03K17/10
- IPC: H03K17/10 ; H01L21/8234 ; H01L27/06 ; H01L27/12 ; H03K17/693

Abstract:
A structure includes a field effect transistor (FET) stack including a plurality of transistors over a buried insulator layer. A polysilicon isolation region is in a substrate below the FET stack and the buried insulator layer. A resistor network is in the polysilicon isolation region, the resistor network having a different resistivity than the polysilicon isolation region. The resistor network may include a resistive wire having a first width and a resistive pad within the resistive wire under each FET in the FET stack. Each resistive pad has a second width larger than the first width of the resistive wire. A length of the resistive wire is different aside each resistive pad to adjust a threshold voltage of an adjacent FET in the FET stack to a predetermined value to compensate for non-linear voltage distribution between an input and an output of the FET stack.
Public/Granted literature
- US20230188131A1 STRUCTURE INCLUDING RESISTOR NETWORK FOR BACK BIASING FET STACK Public/Granted day:2023-06-15
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