Invention Grant
- Patent Title: Pulse width expansion apparatus and electronic device manufacturing method
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Application No.: US17858765Application Date: 2022-07-06
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Publication No.: US12038567B2Publication Date: 2024-07-16
- Inventor: Hirotaka Miyamoto , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B5/30 ; G02B17/02 ; G02B26/08 ; G02B27/28 ; G03F7/00 ; H01S3/00 ; H01S3/08 ; H01S3/225 ; H01S3/23

Abstract:
A pulse width expansion apparatus according to an aspect of the present disclosure includes a polarization beam splitter and a transfer optical system. The transfer optical system includes ¼-wavelength and reflection mirror pairs. The ¼-wavelength mirror pair include first and second ¼-wavelength mirrors. The first ¼-wavelength mirror provides ¼-wavelength phase shift and reflects a pulse laser beam. The second ¼-wavelength mirror provides ¼-wavelength phase shift and reflects the pulse laser beam reflected by the first ¼-wavelength mirror. The reflection mirror pair are disposed on an optical path before and after or between the ¼-wavelength mirror pair. The transfer optical system transfers an image of an input pulse laser beam on the polarization beam splitter to the optical path between the ¼-wavelength mirror pair at one-to-one magnification as a first transfer image and transfers the first transfer image to the polarization beam splitter at one-to-one magnification as a second transfer image.
Public/Granted literature
- US20220350120A1 PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-11-03
Information query
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