Invention Grant
- Patent Title: Substrate lift mechanism and reactor including same
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Application No.: US18100660Application Date: 2023-01-24
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Publication No.: US12040217B2Publication Date: 2024-07-16
- Inventor: Eric Hill , John DiSanto
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- The original application number of the division: US15672096 2017.08.08
- Main IPC: H01L21/687
- IPC: H01L21/687 ; C23C16/458 ; C30B25/08 ; C30B25/12 ; H01L21/67

Abstract:
A substrate support assembly suitable for use in a reactor including a common processing and substrate transfer region is disclosed. The substrate support assembly includes a susceptor and one or more lift pins that can be used to lower a substrate onto a surface of the susceptor and raise the substrate from the surface, to allow transfer of the substrate from the processing region, without raising or lowering the susceptor.
Public/Granted literature
- US20230163019A1 SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME Public/Granted day:2023-05-25
Information query
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