Invention Grant
- Patent Title: Microfluidic channels sealed with directionally-grown plugs
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Application No.: US17858660Application Date: 2022-07-06
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Publication No.: US12040252B2Publication Date: 2024-07-16
- Inventor: Ramsey Hazbun , Cameron Luce , Siva P. Adusumilli , Mark Levy
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H01L21/762 ; H01L23/367 ; H01L29/51
Abstract:
Structures for a microfluidic channel and methods of forming a structure for a microfluidic channel. The structure comprises a trench in a semiconductor substrate and a semiconductor layer inside the trench. The trench has an entrance and a sidewall extending from the entrance into the semiconductor substrate. The semiconductor layer has a first portion surrounding a portion of the trench to define a cavity and a second portion positioned to obstruct the entrance to the trench. The second portion of the semiconductor layer is thicker than the first portion of the semiconductor layer.
Public/Granted literature
- US20240014101A1 MICROFLUIDIC CHANNELS SEALED WITH DIRECTIONALLY-GROWN PLUGS Public/Granted day:2024-01-11
Information query
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