Invention Grant
- Patent Title: Semiconductor package including under bump metallization pad
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Application No.: US17508250Application Date: 2021-10-22
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Publication No.: US12040264B2Publication Date: 2024-07-16
- Inventor: Hyeonjeong Hwang , Kyounglim Suk , Seokhyun Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20210047153 2021.04.12
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/00 ; H01L25/065 ; H01L25/10

Abstract:
A semiconductor package includes a semiconductor chip, a lower redistribution layer disposed under the semiconductor chip, the lower redistribution layer including a plurality of lower insulating layers, a plurality of lower redistribution patterns, and a plurality of lower conductive vias, a lower passivation layer disposed under the lower redistribution layer and provided with a recess at a bottom surface of the lower passivation layer, an under bump metallization (UBM) pad disposed in the first recess, a UBM protective layer disposed in the first recess and connected to the lower conductive vias while covering a top surface and opposite side surfaces of the UBM pad, and an outer connecting terminal connected to a bottom surface of the UBM pad. The bottom surface of the UBM pad is positioned at a first depth from the bottom surface of the lower passivation layer.
Public/Granted literature
- US20220328388A1 SEMICONDUCTOR PACKAGE INCLUDING UNDER BUMP METALLIZATION PAD Public/Granted day:2022-10-13
Information query
IPC分类: