- 专利标题: Symmetric bi-directional silicon-controlled rectifier for electrostatic discharge protection
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申请号: US17523956申请日: 2021-11-11
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公开(公告)号: US12051690B2公开(公告)日: 2024-07-30
- 发明人: Sagar Premnath Karalkar , Prantik Mahajan , Jie Zeng , Ajay Ajay , Milova Paul , Souvick Mitra
- 申请人: GlobalFoundries U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人地址: US NY Malta
- 代理机构: Hoffman Warnick LLC
- 代理商 Francois Pagette
- 主分类号: H01L27/02
- IPC分类号: H01L27/02
摘要:
Disclosed is a semiconductor structure including a semiconductor substrate (e.g., a P-substrate) and a symmetric BDSCR. The BDSCR includes, within the substrate, a first well (e.g., a low-doped deep Nwell) and, within the first well, symmetric side sections and a middle section positioned laterally between the side sections. Each side section includes: second and third wells (e.g., Pwells), where the third well is shallower than and has a higher conductivity level than the second well. Each middle section includes multiple floating wells including: two fourth wells (e.g., Nwells), which have a higher conductivity level than the first well, and a fifth well (e.g., another Pwell), which is positioned laterally between and shallower than the fourth wells. By incorporating the floating wells into the middle section, high current tolerance is improved.
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