Invention Grant
- Patent Title: Vacuum pump and electromagnet unit used for vacuum pump comprising sensors and electromagnets connected to two sides of a circuit board
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Application No.: US17632582Application Date: 2020-08-17
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Publication No.: US12060885B2Publication Date: 2024-08-13
- Inventor: Yongwei Shi
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo
- Agency: Shumaker & Sieffert, P.A.
- Priority: JP 19153295 2019.08.23
- International Application: PCT/JP2020/031033 2020.08.17
- International Announcement: WO2021/039478A 2021.03.04
- Date entered country: 2022-02-03
- Main IPC: H02K11/01
- IPC: H02K11/01 ; F04D19/04 ; F16C32/04 ; H02K11/21

Abstract:
An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
Public/Granted literature
- US20220356883A1 VACUUM PUMP AND ELECTROMAGNET UNIT USED FOR VACUUM PUMP Public/Granted day:2022-11-10
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