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公开(公告)号：US20240093688A1
公开(公告)日：2024-03-21
申请号：US18263257
申请日：2022-02-09
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Haruki Suzuki
IPC: F04D19/04
CPC classification number: F04D19/042
Abstract: A vacuum pump which can reduce a stress generated in a connected part between a rotating body and a rotating shaft is provided. A rotating body is provided having rotor blades provided on an outer periphery of a rotor-blade forming portion, and fastened to the rotor shaft by a bolt, and rotatable with the rotor shaft. At least either one of a fitting hole portion fitted with the rotating shaft and a through hole portion, through which a bolt penetrates, in the rotating body is a stress-reduction target portion, and a groove portion that reduces stress generated in the stress-reduction target portion during rotation of the rotating body is provided.
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公开(公告)号：US20160025096A1
公开(公告)日：2016-01-28
申请号：US14763345
申请日：2013-12-25
Applicant: EDWARDS JAPAN LIMITED
Inventor： Yongwei Shi , Manabu Nonaka , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC classification number: F04D19/002 , F04D19/044 , F04D25/06 , F04D27/0292 , F04D29/053 , F04D29/325 , F04D29/40 , F04D29/522 , F04D29/584 , F05D2260/607
Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.
Abstract translation: 本发明的目的是减少真空泵中的产品的附着量，并且有效地防止由于磁通量泄漏而在真空泵电气系统中发生故障。 真空泵包括：封闭在泵壳体中的转子，固定在转子上的旋转轴，可旋转地支撑旋转轴的支撑装置，使旋转轴旋转的驱动装置，以及形成螺旋槽排气部分的定子 螺纹槽排出部定子与转子的外周侧或内周侧之间的螺旋槽排气通路。 加热部设置在螺纹槽排气部定子的下方。 加热部包括轭，线圈和加热板。 加热部通过向线圈供给交流电而通过电磁感应加热来加热轭和加热板。
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公开(公告)号：US20220106961A1
公开(公告)日：2022-04-07
申请号：US17426130
申请日：2020-01-27
Applicant: Edwards Japan Limited
Inventor： Tsutomu Takaada , Yongwei Shi
IPC: F04D19/04
Abstract: Provided are a vacuum pump which can be reduced in size without reducing exhaust performance, and a connection port which is used in the vacuum pump. The connection port which connects the vacuum pump and an auxiliary pump includes an oval first opening connectable to the vacuum pump and a circular second opening connectable to the auxiliary pump, and a diameter dimension of the first opening is set to be smaller than a diameter dimension of the second opening in an axial direction of the vacuum pump.
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4.发明申请公开(公告)号：US20200166041A1
公开(公告)日：2020-05-28
申请号：US16612911
申请日：2018-04-20
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Tooru Miwata , Yoshiyuki Sakaguchi
Abstract: Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.
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公开(公告)号：US10364814B2
公开(公告)日：2019-07-30
申请号：US14763345
申请日：2013-12-25
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Manabu Nonaka , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
IPC: F04D29/58 , F04D19/00 , F04D27/02 , F04D29/52 , F04D25/06 , F04D29/053 , F04D29/32 , F04D29/40 , F04D19/04
Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.
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Patent Agency Ranking
公开(公告)号：US20230323890A1
公开(公告)日：2023-10-12
申请号：US18006290
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yongwei Shi
CPC classification number: F04D29/26 , F04D19/04 , F04D29/403
Abstract: In a vacuum pump in which the rotor blade in one stage has an outer diameter that is smaller at an outlet port side, or the rotor blade in one stage has an inner diameter that is larger at an outlet port side, at least one of an outer circumference portion or an inner circumference portion of the stator blade that is located immediately above the rotor blade having a smaller outer diameter or immediately above the rotor blade having a larger inner diameter has a tapered surface sloping down to an outlet port side. By providing the tapered surface, entering molecules are reflected at a right angle, sent toward an inner circumference side, and hit by the rotor blade in the upper stage. The molecules are thus sent to a next exhaustion stage.
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公开(公告)号：US20230114695A1
公开(公告)日：2023-04-13
申请号：US17906129
申请日：2021-03-11
Applicant: Edwards Japan Limited
Inventor： Kenya Nagase , Haruki Suzuki , Yongwei Shi
Abstract: A vacuum pump and a vacuum pump component are provided that achieve the efficient heat dissipation of the rotor without changing the material or structure of stator blades or rotor blades. The vacuum pump includes a casing having a gas inlet port and a gas outlet port and a rotor configured to rotate in the casing. The vacuum pump is configured to exhaust gas from the gas inlet port to the gas outlet port by rotation of the rotor. The rotor substantially has the shape of a cylinder. A purge gas flows between the inner circumference surface of the rotor and the stator column that faces at least a part of the inner circumference surface of the rotor. A projection or a groove that disturbs the flow of the purge gas is provided in the flow passage of the purge gas.
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公开(公告)号：US20210262477A1
公开(公告)日：2021-08-26
申请号：US17058342
申请日：2019-05-24
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi
Abstract: A vacuum pump and a sensor target are provided that are inexpensive and widen the linearity range of the sensor sensitivity as compared to a configuration in which a ferromagnetic material is used for the sensor target of a displacement sensor, and also reduce the possibility of touch down even when a disturbance occurs. An axial displacement sensor 109 includes a shaft 109A, which is extended through and fixed to the central section of a holder 5 holding an axial electromagnet 106, and a bobbin 109B, which is coupled to the upper end of the shaft 109A and around which a coil 7 is wound. A shaft end portion 113B, which has the shape of a small-diameter column, projects from the lower end of a rotor shaft 113 and is separated from the coil 7 by a gap 2. An external thread is formed on the outer circumference of the shaft end portion 113B so that a nut 19, which has an internal thread on the inner side, is engaged with the shaft end portion 113B. The area where the internal thread is formed does not extend over the entire thickness of the nut 19 and extends only partially. That is, the nut 19 has a threaded hole 19A opening only at the upper end. The nut 19 is made of a single material of low-carbon steel.
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公开(公告)号：US12060885B2
公开(公告)日：2024-08-13
申请号：US17632582
申请日：2020-08-17
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi
CPC classification number: F04D19/04 , F16C32/0446 , F16C32/0461 , H02K11/014 , H02K11/21 , H02K2211/03
Abstract: An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
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公开(公告)号：US20220356883A1
公开(公告)日：2022-11-10
申请号：US17632582
申请日：2020-08-17
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi
Abstract: An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
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