Invention Grant
- Patent Title: Memory device
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Application No.: US18164626Application Date: 2023-02-06
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Publication No.: US12062615B2Publication Date: 2024-08-13
- Inventor: Ching Hung Wang , Shih Chin Lee , Chen-Yu Cheng , Tzung-Ting Han
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. PATENTS
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H10B41/27 ; H10B41/41 ; H10B43/27 ; H10B43/40

Abstract:
Provided is a memory device including a substrate, a stack structure, a plurality of pads and an additional dielectric layer. The substrate has an array region and a staircase region. The stack structure is disposed on the substrate. The stack structure includes a plurality of dielectric layers and a plurality of conductive layers stacked alternately. The pads are disposed on the substrate in the staircase region. The pads are respectively connected to the conductive layers, so as to form a staircase structure. The additional dielectric layer is disposed on the stack structure to contact a topmost conductive layer of the conductive layers. A topmost pad of the pads includes a landing portion to contact a plug and an extension portion. The landing portion is laterally adjacent to the additional dielectric layer, and the extension portion extends over a top surface of the additional dielectric layer.
Public/Granted literature
- US20230187359A1 MEMORY DEVICE Public/Granted day:2023-06-15
Information query
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