Invention Grant
- Patent Title: Chamber component cleanliness measurement system
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Application No.: US17612381Application Date: 2020-05-19
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Publication No.: US12072318B2Publication Date: 2024-08-27
- Inventor: Amir A. Yasseri , Duane Outka , Armen Avoyan , Kennet Cresencio Baylon , John Daugherty , Girish M. Hundi , Cliff La Croix
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- International Application: PCT/US2020/033578 2020.05.19
- International Announcement: WO2020/236803A 2020.11.26
- Date entered country: 2021-11-18
- Main IPC: G01N29/14
- IPC: G01N29/14 ; B08B3/12 ; G01N1/02 ; G01N29/02 ; H01J37/32 ; G01N1/00 ; G01N1/40

Abstract:
An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.
Public/Granted literature
- US20220252548A1 CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM Public/Granted day:2022-08-11
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