Invention Grant
- Patent Title: Semiconductor devices and methods for manufacturing the same
-
Application No.: US17667608Application Date: 2022-02-09
-
Publication No.: US12080798B2Publication Date: 2024-09-03
- Inventor: Chae Ho Na , Sung Soo Kim , Sun Ki Min , Dong Hyun Roh
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR 20210071267 2021.06.02
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/417

Abstract:
Semiconductor devices and methods of forming the same are provided. The semiconductor devices may include a first fin-type pattern and a second fin-type pattern on a substrate, a first epitaxial pattern on the first fin-type pattern, a second epitaxial pattern on the second fin-type pattern, and a lower field insulating film on the substrate and extends on a sidewall of the first fin-type pattern and a sidewall of the second fin-type pattern, wherein the lower field insulating film includes a protrusion protruding in a third direction. The protrusion of the lower field insulating film may be between the first fin-type pattern and the second fin-type pattern, and a vertical level of a top surface of the protrusion of the lower field insulating film increases and then decreases with increasing distance from the sidewall of the first fin-type pattern.
Public/Granted literature
- US20220393030A1 SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2022-12-08
Information query
IPC分类: