Invention Grant
- Patent Title: Semiconductor structure and forming method therefor, and memory and forming method therefor
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Application No.: US17444785Application Date: 2021-08-10
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Publication No.: US12082419B2Publication Date: 2024-09-03
- Inventor: Yiming Zhu , Erxuan Ping
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2010344169.4 2020.04.27
- Main IPC: H10B51/20
- IPC: H10B51/20 ; G11C7/18 ; H10B51/10

Abstract:
A method for forming the semiconductor structure includes: providing a substrate, forming a sacrificial layer and an active layer on the sacrificial layer on the substrate; etching the active layer and the sacrificial layer to form active lines extending along a first direction; forming a first isolation layer that fills a spacing between the active lines; etching ends of the active lines to form openings, and exposing the sacrificial layer on side walls of the openings; removing the sacrificial layer along the openings, and forming gap between a bottom of the active lines and the substrate; and filling the gaps with a conductive material to form bit lines extending along the first direction.
Public/Granted literature
- US20210375939A1 SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREFOR, AND MEMORY AND FORMING METHOD THEREFOR Public/Granted day:2021-12-02
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