Invention Grant
- Patent Title: Method for manufacturing a substrate for a front-facing image sensor
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Application No.: US17418148Application Date: 2019-12-23
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Publication No.: US12100727B2Publication Date: 2024-09-24
- Inventor: Walter Schwarzenbach , Ludovic Ecarnot , Damien Massy , Nadia Ben Mohamed , Nicolas Daval , Christophe Girard , Christophe Maleville
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR 74134 2018.12.24
- International Application: PCT/FR2019/053281 2019.12.23
- International Announcement: WO2020/136344A 2020.07.02
- Date entered country: 2021-06-24
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/265 ; H01L21/322 ; H01L21/762 ; H01L31/18

Abstract:
A method of manufacturing a substrate for a front-facing image sensor, comprises:—providing a donor substrate comprising a semiconductor layer to be transferred,—providing a semiconductor carrier substrate,—bonding the donor substrate to the carrier substrate, an electrically insulating layer being at the bonding interface,—transferring the semiconductor layer to the carrier substrate,—implanting gaseous ions in the carrier substrate via the transferred semiconductor layer and the electrically insulating layer, and—after the implantation, epitaxially growing an additional semiconductor layer on the transferred semiconductor layer.
Public/Granted literature
- US20220059603A1 METHOD FOR MANUFACTURING A SUBSTRATE FOR A FRONT-FACING IMAGE SENSOR Public/Granted day:2022-02-24
Information query
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