Invention Grant
- Patent Title: Vibration isolation table for semiconductor equipment and vibration isolation table system including the same
-
Application No.: US17718423Application Date: 2022-04-12
-
Publication No.: US12110938B2Publication Date: 2024-10-08
- Inventor: Hyunchul Kim , Souk Kim , Younghoon Sohn
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR 20210122371 2021.09.14
- Main IPC: F16F15/02
- IPC: F16F15/02

Abstract:
A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.
Public/Granted literature
Information query