Invention Grant
- Patent Title: Forming N-type and P-type horizontal gate-all-around devices
-
Application No.: US17472759Application Date: 2021-09-13
-
Publication No.: US12113067B2Publication Date: 2024-10-08
- Inventor: Ruilong Xie , Kangguo Cheng , Juntao Li , Carl Radens
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Edward J. Wixted, III
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8238 ; H01L27/092

Abstract:
An approach provides a semiconductor structure for a first device with a first plurality of channels with a larger horizontal dimension than a vertical dimension of the first plurality of channels a second device comprising a second plurality of channels with a smaller horizontal dimension than the vertical dimension of the second plurality of channels. The first plurality of channels and the second plurality of channels have a same channel width in embodiments of the present invention. The first device is an n-type horizontal gate-all-around device and the second device is a p-type horizontal gate-all-around device.
Public/Granted literature
- US20230079751A1 FORMING N-TYPE AND P-TYPE HORIZONTAL GATE-ALL-AROUND DEVICES Public/Granted day:2023-03-16
Information query
IPC分类: