- 专利标题: Spacer film scheme for polarization improvement
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申请号: US18150281申请日: 2023-01-05
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公开(公告)号: US12119035B2公开(公告)日: 2024-10-15
- 发明人: Tzu-Yu Lin , Yao-Wen Chang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: G11B9/02
- IPC分类号: G11B9/02 ; H10B51/30
摘要:
The present disclosure relates to an integrated chip. The integrated chip includes a lower electrode disposed within a dielectric structure over a substrate. A ferroelectric data storage structure is disposed over the lower electrode and an upper electrode is disposed over the ferroelectric data storage structure. One or more stressed sidewall spacers are arranged on opposing sides of the upper electrode. The ferroelectric data storage structure has an orthorhombic phase concentration that varies from directly below the one or more stressed sidewall spacers to laterally outside of the one or more stressed sidewall spacers.
公开/授权文献
- US20240038265A1 SPACER FILM SCHEME FORM POLARIZATION IMPROVEMENT 公开/授权日:2024-02-01
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