Invention Grant
- Patent Title: Semiconductor memory device using a ferroelectric characteristic of charge storage layer and operating method thereof
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Application No.: US17666448Application Date: 2022-02-07
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Publication No.: US12120883B2Publication Date: 2024-10-15
- Inventor: Sang-Yong Park , Jin-Hong Park , Sungjoo Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,RESEARCH AND BUSINESS FOUNDATION SUNGKY
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,RESEARCH AND BUSINESS FOUNDATION SUNGKY
- Current Assignee Address: KR Suwon-si; KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20210025467 2021.02.25
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H01L29/51 ; H01L29/78 ; H10B51/30

Abstract:
A semiconductor memory device capable of improving performance by the use of a charge storage layer including a ferroelectric material is provided. The semiconductor memory device includes a substrate, a tunnel insulating layer contacting the substrate, on the substrate, a charge storage layer contacting the tunnel insulating layer and including a ferroelectric material, on the tunnel insulating layer, a barrier insulating layer contacting the charge storage layer, on the charge storage layer, and a gate electrode contacting the barrier insulating layer, on the barrier insulating layer.
Public/Granted literature
- US20220271057A1 SEMICONDUCTOR MEMORY DEVICE AND OPERATING METHOD THEREOF Public/Granted day:2022-08-25
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