- 专利标题: Doped sidewall spacer/etch stop layer for memory
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申请号: US17388484申请日: 2021-07-29
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公开(公告)号: US12127483B2公开(公告)日: 2024-10-22
- 发明人: Bi-Shen Lee , Hai-Dang Trinh , Hsun-Chung Kuang , Cheng-Yuan Tsai
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H10N50/80
- IPC分类号: H10N50/80 ; H10B61/00 ; H10N50/01
摘要:
Various embodiments of the present disclosure are directed towards an integrated circuit (IC) chip comprising a memory cell with a sidewall spacer, and/or an etch stop layer, doped to reduce charge accumulation at an interface between the sidewall spacer and the etch stop layer. The memory cell comprises a bottom electrode, a data storage element overlying the bottom electrode, and a top electrode overlying the data storage element. The sidewall spacer overlies the bottom electrode on a common sidewall formed by the data storage element and the top electrode, and the etch stop layer lines the sidewall spacer. The sidewall spacer and the etch stop layer directly contact at the interface and form an electric dipole at the interface. The doping to reduce charge accumulation reduces an electric field produced by the electric dipole, thereby reducing the effect of the electric field on the memory cell.
公开/授权文献
- US20220393101A1 DOPED SIDEWALL SPACER/ETCH STOP LAYER FOR MEMORY 公开/授权日:2022-12-08
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