• Patent Title: Composition for copper bump electrodeposition comprising a polyaminoamide type leveling agent
  • Application No.: US17995186
    Application Date: 2021-03-24
  • Publication No.: US12134834B2
    Publication Date: 2024-11-05
  • Inventor: Marco ArnoldAlexander FluegelCharlotte EmnetNadine Engelhardt
  • Applicant: BASF SE
  • Applicant Address: DE Ludwigshafen am Rhein
  • Assignee: BASF SE
  • Current Assignee: BASF SE
  • Current Assignee Address: DE Ludwigshafen am Rhein
  • Agency: Armstrong Teasdale LLP
  • Priority: EP20168057 20200403
  • International Application: PCT/EP2021/057522 WO 20210324
  • International Announcement: WO2021/197950 WO 20211007
  • Main IPC: C25D3/38
  • IPC: C25D3/38
Composition for copper bump electrodeposition comprising a polyaminoamide type leveling agent
Abstract:
Described herein is a composition including copper ions, an acid, and at least one polyaminoamide including, a group of formula L1 [A-B-A′-Z]n[Y—Z]m  (L1) where B is a diacid fragment of formula L2 A, A′ are amine fragments independently selected from the group consisting of formula L3a and formula L3b Y is a co-monomer fragment; Z is a coupling fragment of formula L4 n is an integer of from 1 to 400; and m is 0 or an integer of from 1 to 400.
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