• Patent Title: COMPOSITION FOR COPPER BUMP ELECTRODEPOSITION COMPRISING A POLYAMINOAMIDE TYPE LEVELING AGENT
  • Application No.: US17995186
    Application Date: 2021-03-24
  • Publication No.: US20230142238A1
    Publication Date: 2023-05-11
  • Inventor: Marco ARNOLDAlexander FLUEGELCharlotte EMNETNadine ENGELHARDT
  • Applicant: BASF SE
  • Applicant Address: DE Ludwigshafen am Rhein
  • Assignee: BASF SE
  • Current Assignee: BASF SE
  • Current Assignee Address: DE Ludwigshafen am Rhein
  • Priority: WO 168057.6 2020.04.03
  • International Application: PCT/EP2021/057522 2021.03.24
  • Date entered country: 2022-09-30
  • Main IPC: C25D3/38
  • IPC: C25D3/38
COMPOSITION FOR COPPER BUMP ELECTRODEPOSITION COMPRISING A POLYAMINOAMIDE TYPE LEVELING AGENT
Abstract:
Described herein is a composition including copper ions, an acid, and at least one polyaminoamide including, a group of formula L1


[A-B-A′-Z]n[Y—Z]m  (L1)

where
B is a diacid fragment of formula L2




A, A′ are amine fragments independently selected from the group consisting of formula L3a






and formula L3b








Y is a co-monomer fragment;

Z is a coupling fragment of formula L4





n is an integer of from 1 to 400; and

m is 0 or an integer of from 1 to 400.
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