- Patent Title: Control unit and substrate treating apparatus including the same
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Application No.: US17876545Application Date: 2022-07-29
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Publication No.: US12138913B2Publication Date: 2024-11-12
- Inventor: Yeon Chul Song , Myeong Jun Lim , Kwang Sup Kim , Jong Min Lee , Jun Ho Oh , Ji Hoon Yoo , Young Ho Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Womble Bond Dickinson (US) LLP
- Priority: KR10-2021-0130203 20210930
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J29/20 ; B41J2/165

Abstract:
Provided are a control unit that predicts the life of an inkjet head unit and maximizes its life to be used, and a substrate treating apparatus including the same. The control unit performs maintenance of an inkjet head unit for discharging a substrate treatment liquid onto a substrate and comprises a count module for counting the number of discharges for each nozzle of the inkjet head unit, a comparison module for comparing the number of discharges with a reference value to determine whether the number of discharges is equal to or greater than the reference value, and an evaluation module for evaluating whether a life of the inkjet head unit has reached a usable life based on whether the number of discharges of each nozzle is equal to or greater than the reference value.
Public/Granted literature
- US20230101546A1 CONTROL UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Public/Granted day:2023-03-30
Information query
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