Invention Grant
- Patent Title: Directional light extraction from micro-LED via localization of light emitting area using mesa sidewall epitaxy
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Application No.: US17703578Application Date: 2022-03-24
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Publication No.: US12148863B2Publication Date: 2024-11-19
- Inventor: Alexander Tonkikh , Salim Boutami , Sophia Antonia Fox
- Applicant: Meta Platforms Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Meta Platforms Technologies, LLC
- Current Assignee: Meta Platforms Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L33/44
- IPC: H01L33/44 ; H01L27/15 ; H01L33/00 ; H01L33/24 ; H01L33/30 ; H01L33/58 ; H01L33/60 ; H01L33/62

Abstract:
A micro-light emitting diode includes a semiconductor mesa structure that includes at least a portion of an n-type semiconductor layer, an active region configured to emit visible light, and a p-type semiconductor layer. The micro-LED device also includes an insulator layer that includes an undoped semiconductor passivation layer grown on sidewalls of the semiconductor mesa structure, and a dielectric passivation layer characterized by a refractive index lower than a refractive index of the undoped semiconductor passivation layer. The micro-LED device further includes a reflective metal layer deposited on the dielectric passivation layer, and a micro-lens configured to collimate the visible light emitted by the active region, where a ratio between a width of the micro-lens and a width of the active region may be greater than about 1.5.
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