Invention Grant
- Patent Title: Methods for forming multi-layer vertical NOR-type memory string arrays
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Application No.: US18499091Application Date: 2023-10-31
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Publication No.: US12150304B2Publication Date: 2024-11-19
- Inventor: Scott Brad Herner , Wu-Yi Henry Chien , Jie Zhou , Eli Harari
- Applicant: SUNRISE MEMORY CORPORATION
- Applicant Address: US CA San Jose
- Assignee: SUNRISE MEMORY CORPORATION
- Current Assignee: SUNRISE MEMORY CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: VLP Law Group LLP
- Agent Edward C. Kwok
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/311 ; H01L21/3213

Abstract:
A method for forming 3-dimensional vertical NOR-type memory string arrays uses damascene local bit lines is provided. The method of the present invention also avoids ribboning by etching local word lines in two steps. By etching the local word lines in two steps, the aspect ratio in the patterning and etching of stack of local word lines (“word line stacks”) is reduced, which improves the structural stability of the word line stacks.
Public/Granted literature
- US20240099003A1 METHODS FOR FORMING MULTI-LAYER VERTICAL NOR-TYPE MEMORY STRING ARRAYS Public/Granted day:2024-03-21
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