Invention Grant
- Patent Title: Flat pocket susceptor design with improved heat transfer
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Application No.: US17178204Application Date: 2021-02-17
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Publication No.: US12170213B2Publication Date: 2024-12-17
- Inventor: Zhepeng Cong , Nyi Oo Myo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/458 ; H01L21/08 ; H01L21/687

Abstract:
Embodiments of the present disclosure generally relate to a susceptor for thermal processing of semiconductor substrates. In one embodiment, the susceptor includes an inner region having a pattern formed in a top surface thereof, the pattern including a plurality of substrate support features separated by a plurality of venting channels. The susceptor includes a rim surrounding and coupled to the inner region, wherein the inner region is recessed relative to the rim to form a recessed pocket configured to receive a substrate. The susceptor includes a plurality of bumps extending radially inward from an inner diameter of the rim, the plurality of bumps configured to contact an outer edge of a substrate supported by the plurality of substrate support features for positioning the substrate within the recessed pocket.
Public/Granted literature
- US20220262658A1 FLAT POCKET SUSCEPTOR DESIGN WITH IMPROVED HEAT TRANSFER Public/Granted day:2022-08-18
Information query
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