Invention Grant
- Patent Title: Inter-tier power delivery network (PDN) for dense gate-on-gate 3D logic integration
-
Application No.: US17541561Application Date: 2021-12-03
-
Publication No.: US12176293B2Publication Date: 2024-12-24
- Inventor: Lars Liebmann , Jeffrey Smith , Daniel Chanemougame , Paul Gutwin , Brian Cline , Xiaoqing Xu , David Pietromonaco
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L23/48 ; H01L23/498 ; H01L25/00 ; H01L25/065

Abstract:
Aspects of the present disclosure provide a multi-tier semiconductor structure. For example, the multi-tier semiconductor structure can include a lower semiconductor device tier, and a lower signal wiring structure electrically connected to the lower semiconductor device tier. The multi-tier semiconductor structure can further include a primary power delivery network (PDN) structure disposed over the lower semiconductor device tier and the lower signal wiring structure and electrically connected to the lower semiconductor device tier. The multi-tier semiconductor structure can further include an upper semiconductor device tier disposed over and electrically connected the first PDN structure, and an upper signal wiring structure disposed over the primary PDN structure and electrically connected to the upper semiconductor device tier.
Public/Granted literature
- US20220181263A1 INTER-TIER POWER DELIVERY NETWORK (PDN) FOR DENSE GATE-ON-GATE 3D LOGIC INTEGRATION Public/Granted day:2022-06-09
Information query
IPC分类: