Invention Grant
- Patent Title: Structure of memory device having floating gate with protruding structure
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Application No.: US18365243Application Date: 2023-08-04
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Publication No.: US12185532B2Publication Date: 2024-12-31
- Inventor: Liang Yi , Zhiguo Li , Chi Ren , Qiuji Zhao , Boon Keat Toh
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: CN201910510488.5 20190613
- Main IPC: H10B41/30
- IPC: H10B41/30 ; H01L29/423 ; H01L29/51 ; H01L29/788

Abstract:
A structure of memory device includes an active region in a substrate, a dielectric layer on the active region, and a floating gate disposed on the dielectric layer. The active region extends along a first direction in a top-view. The floating gate includes a first protruding structure extending along the first direction from a sidewall of the floating gate protruding from a top surface of the substrate. The whole of the first protruding structure is located in the active region.
Public/Granted literature
- US20230380154A1 STRUCTURE OF MEMORY DEVICE HAVING FLOATING GATE WITH PROTRUDING STRUCTURE Public/Granted day:2023-11-23
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