Invention Grant
- Patent Title: Method for manufacturing an optoelectronic device with axial-type electroluminescent diodes
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Application No.: US17619564Application Date: 2020-06-25
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Publication No.: US12199076B2Publication Date: 2025-01-14
- Inventor: Bruno-Jules Daudin , Walf Chikhaoui , Marion Gruart
- Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives , Aledia , Universite Grenoble Alpes
- Applicant Address: FR Paris; FR Echirolles; FR Saint Martin D'Heres
- Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,Aledia,Universite Grenoble Alpes
- Current Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,Aledia,Universite Grenoble Alpes
- Current Assignee Address: FR Paris; FR Echirolles; FR Saint Martin D'Heres
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: FR1906899 20190625
- International Application: PCT/EP2020/067967 WO 20200625
- International Announcement: WO2020/260546 WO 20201230
- Main IPC: H01L25/075
- IPC: H01L25/075 ; H01L33/00 ; H01L33/06 ; H01L33/14 ; H01L33/20 ; H01L33/30 ; H01L33/32

Abstract:
A light-emitting diode manufacturing method including the forming of three-dimensional semiconductor elements, extending along parallel axes, made of a III-V compound, each having a lower portion and a flared upper portion inscribed within a frustum of half apical angle α. The method further comprises, for each semiconductor element, the forming of an active area covering the top of the upper portion and the forming of at least one semiconductor layer of the III-V compound covering the active area by vapor deposition at a pressure lower than 10 mPa, by using a flux of the group-III element along a direction inclined by an angle θIII and a flux of the group-V element along a direction inclined by an angle θV with respect to the vertical axis, angles θIII and θV being smaller than angle α.
Public/Granted literature
- US12051678B2 Method for manufacturing an optoelectronic device with axial-type electroluminescent diodes Public/Granted day:2024-07-30
Information query
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