Invention Grant
- Patent Title: Process for manufacturing a thin-film piezoelectric microelectromechanical structure having improved electrical characteristics
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Application No.: US17485719Application Date: 2021-09-27
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Publication No.: US12225824B2Publication Date: 2025-02-11
- Inventor: Domenico Giusti , Irene Martini , Davide Assanelli , Paolo Ferrarini , Carlo Luigi Prelini , Fabio Quaglia
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy LLC
- Priority: IT102020000022813 20200928
- Main IPC: H10N30/057
- IPC: H10N30/057 ; B81B7/02 ; H10N30/00 ; H10N30/30 ; H10N30/87 ; H10N30/20

Abstract:
A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.
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