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公开(公告)号:US11990851B2
公开(公告)日:2024-05-21
申请号:US17216375
申请日:2021-03-29
发明人: Birol Ozturk , Peker Milas
IPC分类号: H10N30/077 , H02N2/00 , H02N2/18 , H10N30/057 , H10N30/098 , H10N30/30 , H10N30/50 , H10N30/857 , H10N30/87
CPC分类号: H02N2/22 , H02N2/18 , H10N30/057 , H10N30/077 , H10N30/098 , H10N30/30 , H10N30/50 , H10N30/857 , H10N30/877 , H10N30/878 , Y10T29/42
摘要: A method for manufacturing a piezoelectric element for generating electricity upon flexing of the element including the steps spin-coating a first substrate layer onto a support substrate; depositing a first electrode film onto the first substrate layer; spin coating polyvinylidene fluoride (PVDF) containing solution on the first electrode film to result in a PVDF film; annealing the PVDF film; depositing a second electrode film onto the PVDF film; spin-coating a second substrate layer on top of the second electrode film; forming a hole through the first and second substrate layers; filling the hole with silver paste to contact to the first and second electrode layers; peeling a resulting substrate/electrode/PVDF/electrode/substrate device from the support substrate; and placing a drop of silver paste in the hole formed in the first substrate layer.
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公开(公告)号:US20240114795A1
公开(公告)日:2024-04-04
申请号:US18092942
申请日:2023-01-04
发明人: Yu Shen , Qiang Dan , Yiwei Zhou , Yang Li
IPC分类号: H10N30/20 , B81B7/02 , H10N30/00 , H10N30/057 , H10N30/853
CPC分类号: H10N30/20 , B81B7/02 , H10N30/057 , H10N30/10513 , H10N30/853 , B81B2201/0257 , B81B2203/0315 , B81B2203/04
摘要: The present invention provides a micro electromechanical system (MEMS), which includes: a base with a cavity, a vibration structure includes a structural layer, a piezoelectric composite layer and a flexible layer; the structural layer includes a structural slab, a structural fixing portion and a plurality of structural springs; the piezoelectric composite layer includes a piezoelectric film, a first electrode layer and a second electrode layer; the stress of the piezoelectric composite layer can be released through the elastic actions of the structural springs. In addition, the rigidity of the overall structure is ensured and will not be too low. Therefore, the sound pressure level of the MEMS piezoelectric loudspeaker is improved, and the THD is reduced to improve the performance of the MEMS piezoelectric loudspeaker.
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公开(公告)号:US20230320228A1
公开(公告)日:2023-10-05
申请号:US18179929
申请日:2023-03-07
发明人: Hironori FURUTA , Toru KOSAKA , Takahito SUZUKI , Kenichi TANIGAWA , Takuma ISHIKAWA , Yutaka KITAJIMA , Akio KONISHI , Hiroaki KANAMORI , Takeshi IIZUKA
IPC分类号: H10N39/00 , B06B1/06 , H10N30/00 , H10N30/50 , H10N30/853 , H10N30/88 , H10N30/057 , G01S15/08 , G01S7/521
CPC分类号: H10N39/00 , B06B1/0611 , H10N30/10516 , H10N30/1071 , H10N30/50 , H10N30/853 , H10N30/8536 , H10N30/8542 , H10N30/8554 , H10N30/88 , H10N30/057 , G01S15/08 , G01S7/521
摘要: A piezoelectric film integrated device includes a substrate; an electrode provided on the substrate; a first piezoelectric element that is provided on the electrode and includes a first monocrystalline piezoelectric film and a first electrode film superimposed on the first monocrystalline piezoelectric film; and a second piezoelectric element that is provided on the first piezoelectric element and includes a second monocrystalline piezoelectric film and a second electrode film superimposed on the second monocrystalline piezoelectric film.
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公开(公告)号:US12117605B2
公开(公告)日:2024-10-15
申请号:US17355861
申请日:2021-06-23
CPC分类号: G02B26/04 , H10N30/057 , H10N30/2047 , H10N30/506 , H10N30/88
摘要: A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming successively arranged membranes. The MEMS actuator includes bearing structures and corresponding piezoelectric actuators. The bearing structures are fixed at their top to the deformable structure and laterally delimit corresponding cavities, each having a lateral opening facing the central portion of the main body and closed at the top by a membrane. A fixed part of the membrane is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable to cause deformation of the corresponding membrane and rotation of the bearing structures around the central portion of the main body.
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公开(公告)号:US20240164218A1
公开(公告)日:2024-05-16
申请号:US18550229
申请日:2022-02-10
申请人: Kureha Corporation
发明人: Makoto IMAJI , Kei YAMAGUCHI
IPC分类号: H10N30/50 , H10N30/057 , H10N30/067 , H10N30/87
CPC分类号: H10N30/50 , H10N30/057 , H10N30/067 , H10N30/871 , H10N30/878
摘要: A conductive piezoelectric multi-layer film having high transparency is achieved. A conductive piezoelectric multi-layer film is configured such that a first coating layer having a refractive index of 1.45 or greater and less than 1.60, a second coating layer having a refractive index of 1.60 or greater and less than 1.80, and a conductive layer having a refractive index of 1.80 or greater and 2.20 or less are stacked in this order on at least one surface of a piezoelectric film having a refractive index of 1.30 or greater and 1.50 or less.
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公开(公告)号:US11849642B2
公开(公告)日:2023-12-19
申请号:US16851400
申请日:2020-04-17
发明人: Xudong Wang , Jun Li
IPC分类号: G01L9/08 , B33Y80/00 , H10N30/084 , H10N30/057 , H10N30/092
CPC分类号: H10N30/057 , B33Y80/00 , G01L9/08 , H10N30/084 , H10N30/092
摘要: A piezoelectric artificial artery can be 3D printed to provide the real-time precise sensing of blood pressure and vessel motion patterns enabling early detection of partial occlusions. An electric-field assisted 3D printing method allows for rapid printing and simultaneously poled complex ferroelectric structures with high fidelity and good piezoelectric performance. The print material consists of ferroelectric potassium sodium niobate (KNN) particles embedded within a ferroelectric polyvinylidene fluoride (PVDF) polymer matrix.
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7.
公开(公告)号:US20240074321A1
公开(公告)日:2024-02-29
申请号:US17767438
申请日:2020-10-13
发明人: Steffen Hau , Stephan Lenz , Philipp Linnebach , Dennis Meier , Stefan Seelecke
IPC分类号: H10N30/87 , H10N30/057 , H10N30/063 , H10N30/50 , H10N30/857
CPC分类号: H10N30/874 , H10N30/057 , H10N30/063 , H10N30/50 , H10N30/857 , H10N30/875
摘要: A dielectric transducer for use in a sensor, actuator or generator comprising a plurality of layers of transducer foils, wherein an electrically contactable and conductive layer forming an electrode layer is applied to at least one side of each transducer foil. Expediently, at least two contact elements are provided, each of which is arranged at least partially in a recess or in a through-channel and extends over at least one layer of transducer foils, adjacent electrode layers being electrically conductively connected to different contact elements. Since adjacent electrode layers are connected to different contact elements, intended use is possible, and bringing together several contact lines is advantageously not necessary. Furthermore, the invention relates to a method for producing a multilayer dielectric transducer for use in a sensor, an actuator or a generator, as well as an actuator, a sensor or a generator.
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公开(公告)号:US11903320B2
公开(公告)日:2024-02-13
申请号:US17041249
申请日:2019-01-28
申请人: WACKER CHEMIE AG
IPC分类号: B05D1/00 , H10N30/098 , B41J2/44 , H10N30/50 , H10N30/057 , H10N30/857
CPC分类号: H10N30/098 , B05D1/00 , B41J2/442 , H10N30/057 , H10N30/50 , H10N30/857
摘要: At least one silicone layer is applied to a substrate by a method employing laser transfer printing. The method is suitable for producing sensors, actuators and other EAP layer systems. The silicone layer in these systems may serve as an electrically conducting electrode layer or as a dielectric layer. The method may be configured to be continuous and may be combined with various other coating technologies.
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公开(公告)号:US20240049602A1
公开(公告)日:2024-02-08
申请号:US18381104
申请日:2023-10-17
申请人: InvenSense, Inc.
IPC分类号: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/87 , H10N30/88
CPC分类号: H10N30/50 , H04R17/00 , H10N30/057 , H10N30/871 , H10N30/883
摘要: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
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公开(公告)号:US11737366B2
公开(公告)日:2023-08-22
申请号:US15903204
申请日:2018-02-23
申请人: Rogers Corporation
发明人: Karl E. Sprentall , Trevor Polidore , Robert Mone , Michael Lunt , William Kwan
IPC分类号: H01L41/113 , H10N30/30 , G01L1/14 , H02N1/04 , G01L1/16 , G01L5/00 , H02N1/08 , H10N30/50 , H10N30/057 , H10N30/071 , H10N30/079 , H10N30/857
CPC分类号: H10N30/302 , G01L1/14 , G01L1/142 , G01L1/16 , G01L5/0052 , H02N1/04 , H02N1/08 , H10N30/057 , H10N30/071 , H10N30/079 , H10N30/50 , H10N30/857
摘要: A sensor apparatus includes a first of a plurality of layers having a top layer, a bottom layer, and at least one intermediate layer having an electrical conductor layer, each of the top layer, the bottom layer, and the at least one intermediate layer is disposed in direct contact with a respective adjacent layer. A second of the plurality of layers is disposed in direct contact with the first plurality of layers such that the bottom layer of the second plurality of layers is disposed in direct contact with the top layer of the first plurality of layers. The first and second plurality of layers are productive of a piezoelectric voltage absent of an external current producing device and in response to being deformed, and are productive of a change in capacitance in response to being deformed.
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