Invention Grant
- Patent Title: Moveable edge ring designs
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Application No.: US16497091Application Date: 2017-07-24
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Publication No.: US12230482B2Publication Date: 2025-02-18
- Inventor: Hiran Rajitha Rathnasinghe , Jon Mcchesney
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2017/043527 WO 20170724
- International Announcement: WO2019/022707 WO 20190131
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/683 ; H01L21/687

Abstract:
An edge ring is configured to be raised and lowered relative to a substrate support, via one or more lift pins, in a substrate processing system. The edge ring is further configured to interface with a guide feature extending upward from a bottom ring and/or a middle ring of the substrate support during tuning of the edge ring. The edge ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and an annular groove arranged in the lower surface of the edge ring to interface with the guide feature. Walls of the annular groove are substantially vertical.
Public/Granted literature
- US20200020565A1 MOVEABLE EDGE RING DESIGNS Public/Granted day:2020-01-16
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