公开(公告)号：US12230482B2

公开(公告)日：2025-02-18

申请号：US16497091

申请日：2017-07-24

Applicant: LAM RESEARCH CORPORATION

Inventor： Hiran Rajitha Rathnasinghe ,  Jon Mcchesney

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687

Abstract: An edge ring is configured to be raised and lowered relative to a substrate support, via one or more lift pins, in a substrate processing system. The edge ring is further configured to interface with a guide feature extending upward from a bottom ring and/or a middle ring of the substrate support during tuning of the edge ring. The edge ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and an annular groove arranged in the lower surface of the edge ring to interface with the guide feature. Walls of the annular groove are substantially vertical.

公开(公告)号：US12237154B2

公开(公告)日：2025-02-25

申请号：US16487703

申请日：2017-11-21

Applicant: LAM RESEARCH CORPORATION

Inventor： Hiran Rajitha Rathnasinghe ,  Shawn E S Tokairin ,  Jon McChesney

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: A bottom ring is configured to support a moveable edge ring. The edge ring is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, and a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring. Each of the guide channels includes a first region having a smaller diameter than the guide channel, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring.

公开(公告)号：US12183554B2

公开(公告)日：2024-12-31

申请号：US17681606

申请日：2022-02-25

Applicant: Lam Research Corporation

Inventor： Hiran Rajitha Rathnasinghe ,  Shawn Tokairin ,  Jon Mcchesney

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring and further configured to be raised and lowered relative to a substrate support includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a guide feature in the upper surface defining the annular outer diameter, an inner annular rim in the upper surface defining the annular inner diameter, and a groove defined in the upper surface between the guide feature and the inner annular rim.