Invention Grant
- Patent Title: Object holder, electrostatic sheet and method for making an electrostatic sheet
-
Application No.: US18008283Application Date: 2021-06-09
-
Publication No.: US12235592B2Publication Date: 2025-02-25
- Inventor: Bastiaan Lambertus Wilhelmus Marinus Van De Ven , Koos Van Berkel , Marcus Adrianus Van De Kerkhof , Roger Franciscus Mattheus Maria Hamelinck , Shahab Shervin , Marinus Augustinus Christiaan Verschuren , Johannes Bernardus Charles Engelen , Matthias Kruizinga , Tammo Uitterdijk , Oleksiy Sergiyovich Galaktionov , Kjeld Gertrudus Hendrikus Janssen , Johannes Adrianus Cornelis Maria Pijnenburg , Peter Van Delft
- Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
- Applicant Address: NL Veldhoven; NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee Address: NL Veldhoven; NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP20179524 20200611
- International Application: PCT/EP2021/065418 WO 20210609
- International Announcement: WO2021/250074 WO 20211216
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.
Public/Granted literature
- US20230236518A1 OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTROSTATIC SHEET Public/Granted day:2023-07-27
Information query
