Invention Grant
- Patent Title: CMOS logic element including oxide semiconductor
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Application No.: US17520853Application Date: 2021-11-08
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Publication No.: US12237331B2Publication Date: 2025-02-25
- Inventor: Sung Haeng Cho , Byung-Do Yang , Sooji Nam , Jaehyun Moon , Jae-Eun Pi , Jae-Min Kim
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: NSIP Law
- Priority: KR10-2021-0126684 20210924
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L27/092 ; H01L29/24 ; H03K19/018 ; H03K19/0185 ; H03K19/0948

Abstract:
Provided is a Complementary Metal Oxide Semiconductor (CMOS) logic element. The CMOS logic element includes a substrate including a PMOS area, a circuit wiring structure including an insulating layer and a wiring layer alternately stacked on the substrate, wherein the circuit wiring structure includes an NMOS area vertically spaced apart from the PMOS area, a first transistor disposed on the PMOS area, and a second transistor disposed on the NMOS area and complementarily connected to the first transistor, wherein the first transistor includes a first gate electrode, source/drain areas formed on the PMOS area on both sides of the first gate electrode, and a first channel connecting the source and drain areas to each other, wherein the second transistor includes a second gate electrode and a second channel vertically overlapping the second gate electrode, wherein the first channel includes silicon, wherein the second channel includes an oxide semiconductor.
Public/Granted literature
- US20230097393A1 CMOS LOGIC ELEMENT INCLUDING OXIDE SEMICONDUCTOR Public/Granted day:2023-03-30
Information query
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