Invention Grant
- Patent Title: Gas cylinder automation system
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Application No.: US17876064Application Date: 2022-07-28
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Publication No.: US12297959B2Publication Date: 2025-05-13
- Inventor: Jinho So , Kwangiun Kim , Chigun An , Huigwan Lee , Hyungho Choi , Junhyong Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2021-0141644 20211022
- Main IPC: F17C13/02
- IPC: F17C13/02 ; F17C13/08 ; G01C9/00 ; G01L5/00 ; G01P15/00

Abstract:
A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.
Public/Granted literature
- US20230129083A1 GAS CYLINDER AUTOMATION SYSTEM Public/Granted day:2023-04-27
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