公开(公告)号：US11959594B2

公开(公告)日：2024-04-16

申请号：US17677452

申请日：2022-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minyoung Kim ,  Kwangjun Kim ,  Kyeongsup Byeon ,  Byungjun An ,  Huigwan Lee ,  Byeongchan Jeong ,  Hyungho Choi

IPC: F17C13/00 ,  F17C13/04 ,  F17C13/06

CPC classification number: F17C13/06 ,  F17C13/00 ,  F17C13/04 ,  F17C2205/0311 ,  F17C2205/0323 ,  F17C2209/22

Abstract: An end cap holder may include a base block and a holding block. The base block may be configured to provide an end cap, which may be at a nozzle of the gas cylinder, with a torque for combining/separating the end cap with/from the nozzle. An angle correction groove may be formed at a first surface of the base block oriented toward the end cap. The holding block may be rotatably receivable in the angle correction groove to hold the end cap. The holding block may selectively make point contact with the base block to transmit the torque of the base block to the end cap. Thus, the holding block may accurately hold the end cap tilted to a vertical axis or a horizontal axis.

公开(公告)号：US12297959B2

公开(公告)日：2025-05-13

申请号：US17876064

申请日：2022-07-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jinho So ,  Kwangiun Kim ,  Chigun An ,  Huigwan Lee ,  Hyungho Choi ,  Junhyong Lee

IPC: F17C13/02 ,  F17C13/08 ,  G01C9/00 ,  G01L5/00 ,  G01P15/00

Abstract: A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.

公开(公告)号：US20230278796A1

公开(公告)日：2023-09-07

申请号：US17984373

申请日：2022-11-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyungho Choi ,  Dongwon Kim ,  Minyoung Kim ,  Jongkyu Kim ,  Jinho So ,  Jaehwa Yang ,  Soonwook Hwang

IPC: B65G1/137 ,  B65G1/04 ,  B65G47/24 ,  B25J11/00 ,  B25J5/00 ,  B25J13/08

CPC classification number: B65G1/1373 ,  B25J5/007 ,  B25J11/005 ,  B25J13/08 ,  B65G1/0485 ,  B65G1/0492 ,  B65G47/24 ,  B65G2201/0223 ,  B65G2201/0235 ,  B65G2201/0267 ,  B65G2203/0208

Abstract: A chemical supply system, includes: a chemical container receiving station configured to receive a chemical container, inspect chemical information of the chemical container and confirm the chemical information; a temporary storage configured to store the chemical container; a chemical supply device configured to supply a chemical in the chemical container to a place of use of the chemical; a first robot configured to transport the chemical container for which the chemical information is confirmed from the chemical container receiving station; and a second robot configured to carry the chemical container transported by the first robot into the chemical supply device..

公开(公告)号：US20240190006A1

公开(公告)日：2024-06-13

申请号：US18536727

申请日：2023-12-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyungho Choi ,  Kwangjun Kim ,  Jinho So ,  Huigwan Lee ,  Hyunkook Jeon ,  Soonwook Hwang

IPC: B25J9/16 ,  B25J9/08

CPC classification number: B25J9/1679 ,  B25J9/08 ,  B25J9/106

Abstract: A gas supply stage includes a gas supply cabinet and a fastening vehicle. The gas supply cabinet includes a cabinet frame including an inner space configured to house a gas container and a holding module including a connector holder configured to be detachably fastened to a valve nozzle. The fastening vehicle includes a traveling unit configured to travel in a facility space in which the gas supply cabinet is installed, a multi-axis robot attached to the traveling unit, and a module gripper mounted to the multi-axis robot and configured to detachably grip a valve manipulation module and the holding module.

公开(公告)号：US11846391B2

公开(公告)日：2023-12-19

申请号：US17721881

申请日：2022-04-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Beomsoo Hwang ,  Jongkyu Kim ,  Hyunsik Kim ,  Kyeongsup Byeon ,  Byungjun An ,  Byeongchan Jeong ,  Kimoon Lee ,  Hyungho Choi

IPC: F17C13/04 ,  F17C13/02

CPC classification number: F17C13/04 ,  F17C13/02 ,  F17C2205/037 ,  F17C2205/0329 ,  F17C2205/0382 ,  F17C2250/0478 ,  F17C2260/036

Abstract: A gas supply apparatus includes: a mounting portion installed on a cabinet; a gas supply portion installed on the mounting portion so as to be raisable and lowerable; and a gas container fixing portion fixing a gas container to the gas supply portion, wherein the gas supply portion includes a compressed gas association (CGA) fastening module that is installed on the mounting portion and is detachable from the gas container, and the CGA fastening module includes: a case; an end cap housing rotatably installed on the case; a CGA connector housing installed on the case so as to be disposed adjacent to the end cap housing; a gasket detection sensor installed on a sensor installation mount of the case and disposed under the CGA connector housing; and a power transmission portion spaced apart from the end cap housing and connected to the end cap housing and the CGA connector housing.