Invention Application
US20020056548A1 Heat exchanger 审中-公开
热交换器

Heat exchanger
Abstract:
The heat exchanger of the present invention is capable of easily adjusting temperature of a machining liquid, e.g., slurry, etching liquid. The heat exchanger of the present invention, which adjusts temperature of the machining liquid, comprises a ceramic heat exchanging tube, which is made by baking silicon carbide (SiC).
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