公开(公告)号：US20020056548A1

公开(公告)日：2002-05-16

申请号：US10007820

申请日：2001-12-05

Applicant: Fujikoshi Machinery Corp.

Inventor： Yoshio Nakamura ,  Yoshio Otsuka

IPC: F28D007/10

CPC classification number: F28D7/106 ,  B24B57/02 ,  F28F21/04 ,  Y10S165/905 ,  Y10T29/4935 ,  Y10T29/49361 ,  Y10T29/5176

Abstract: The heat exchanger of the present invention is capable of easily adjusting temperature of a machining liquid, e.g., slurry, etching liquid. The heat exchanger of the present invention, which adjusts temperature of the machining liquid, comprises a ceramic heat exchanging tube, which is made by baking silicon carbide (SiC).

Abstract translation: 本发明的热交换器能够容易地调节加工液体的温度，例如浆料蚀刻液体。 调整加工液温度的本发明的热交换器包括通过烧结碳化硅（SiC）制成的陶瓷热交换管。

公开(公告)号：US20020160702A1

公开(公告)日：2002-10-31

申请号：US10136578

申请日：2002-04-25

Applicant: Fujikoshi Machinery Corp.

Inventor： Hiromi Kishida ,  Yoshio Nakamura ,  Susumu Onishi

IPC: B24B005/00 ,  B24B029/00

CPC classification number: B24B45/00 ,  B24B7/228

Abstract: The abrasive machine of the present invention is capable of controlling a shape of an abrasive face of a small abrasive plate. The abrasive machine comprises: a plate holder holding an abrasive plate; a fixed engaging member being fixed to the plate holder and engaging with the abrasive plate; a first O-ring being provided between the fixed engaging member and the abrasive plate; a second O-ring being provided between the plate holder and the abrasive plate; and a fluid supply-discharge mechanism for supplying a fluid to and discharging the same from a zone enclosed by the abrasive plate, the plate holder and the second O-ring. An outer circumferential face of the abrasive plate is separated from an inner circumferential face of the fixed engaging member.

Abstract translation: 本发明的研磨机能够控制小型研磨板的研磨面的形状。 研磨机包括：保持研磨板的板夹; 固定的接合构件固定到所述板保持器并与所述研磨板接合; 第一O形环设置在固定接合构件和研磨板之间; 第二O形环设置在板支架和研磨板之间; 以及流体供给 - 排出机构，用于从由研磨板，板保持器和第二O形环包围的区域提供流体并将其排出。 研磨板的外周面与固定接合构件的内周面分离。

公开(公告)号：US20040194937A1

公开(公告)日：2004-10-07

申请号：US10825744

申请日：2004-04-16

Applicant: Fujikoshi Machinery Corp.

Inventor： Yoshio Nakamura ,  Yoshio Otsuka

IPC: F28D007/10

CPC classification number: F28D7/106 ,  B24B57/02 ,  F28F21/04 ,  Y10S165/905 ,  Y10T29/4935 ,  Y10T29/49361 ,  Y10T29/5176

Abstract: A method for adjusting temperature of a machining liquid, e.g., slurry, etching liquid, by passing the machining liquid through a heat exchanger. The heat exchanger, which adjusts the temperature of the machining liquid, includes a ceramic heat exchanging tube which is made by baking silicon carbide (SiC).

Abstract translation: 一种用于通过使加工液体通过热交换器来调节加工液体的温度的方法，例如浆料，蚀刻液体。 调节加工液温度的热交换器包括通过焙烧碳化硅（SiC）制成的陶瓷热交换管。

公开(公告)号：US20020053358A1

公开(公告)日：2002-05-09

申请号：US09992191

申请日：2001-11-06

Applicant: Fujikoshi Machinery Corp.

Inventor： Yasuhide Denda ,  Yoshio Nakamura ,  Yoshinobu Nishimoto ,  Makoto Nakajima ,  Tsuyoshi Hasegawa ,  Norihiko Moriya

IPC: B08B003/02

CPC classification number: B24B37/08 ,  B08B3/024 ,  B08B15/04 ,  B08B2203/0229 ,  B24B53/017 ,  Y10S134/902

Abstract: The method of the present invention cleans abrasive faces of an upper abrasive plate and a lower abrasive plate of an abrasive machine. The method is executed by a cleaning device including: a nozzle for jetting water; a brush for preventing the jetted water from scattering in the air, the brush enclosing the nozzle; and another brush for closing a gap between the preventing brush and an outer edge of the upper abrasive plate, the method is characterized by the steps of: jetting water from the nozzle toward the abrasive face of the upper abrasive plate; moving the nozzle toward the outer edge of the upper abrasive plate; and closing the gap by the closing brush when the gap is formed between the preventing brush and the outer edge of the upper abrasive plate.

Abstract translation: 本发明的方法清洗研磨机的上磨料板和下研磨板的磨料面。 该方法由清洁装置执行，该清洁装置包括：用于喷射水的喷嘴; 用于防止喷射水在空气中飞散的刷子，刷子包围喷嘴; 以及用于封闭防磨刷和上磨料板的外边缘之间的间隙的另一刷子，其特征在于以下步骤：从喷嘴向上磨料板的研磨面喷射水; 将喷嘴移向上磨料板的外边缘; 并且当在防磨刷和上磨料板的外边缘之间形成间隙时，通过闭合刷闭合间隙。

公开(公告)号：US20010003883A1

公开(公告)日：2001-06-21

申请号：US09737006

申请日：2000-12-14

Applicant: Fujikoshi Machinery Corp.

Inventor： Yasuhide Denda ,  Hisato Kuroiwa ,  Masanori Furukawa ,  Yoshio Nakamura

IPC: B24B007/04

CPC classification number: B24B37/30 ,  H01L21/30625

Abstract: The abrasive machine is capable of preventing deformation and bad abrasion of an abrasive cloth, maintaining flatness of an abrasive face of an abrasive plate and improving abrading accuracy. The abrasive machine comprises the abrasive plate and a holding unit for holding a work piece. In the holding unit, an inner head has a first concave section. An outer head has a second concave section. A holding plate is provided in the first concave section. An elastic holding member forms a first chamber. An outer enclosing member is provided to the outer head. An inner enclosing member is provided between the outer enclosing member and the inner head. A pressing member presses the abrasive face of the abrasive plate and encloses the holding plate. An elastic ring member a second chamber. A pressurizing unit pressurizes the chambers so as to press the work piece and the pressing member onto the abrasive face.

Abstract translation: 研磨机能够防止研磨布的变形和磨损不良，保持研磨板的研磨面的平坦度并提高研磨精度。 研磨机包括研磨板和用于保持工件的保持单元。 在保持单元中，内头部具有第一凹部。 外头部具有第二凹部。 保持板设置在第一凹部中。 弹性保持构件形成第一室。 外包装件设置在外头部。 内封闭构件设置在外封闭构件和内头之间。 按压构件按压研磨板的研磨面并包围保持板。 弹性环构件，第二室。 加压单元对腔室加压，以将工件和按压构件按压到研磨面上。

公开(公告)号：US20020119735A1

公开(公告)日：2002-08-29

申请号：US10081493

申请日：2002-02-22

Applicant: Fujikoshi Machinery Corp.

Inventor： Yoshio Nakamura ,  Tsuyoshi Hasegawa ,  Susumu Onishi

IPC: B24B001/00 ,  B24B005/00

CPC classification number: B24B37/30

Abstract: In the wafer abrasive machine of the present invention, a gravity center and a rotational axis of a wafer can be corresponded while abrading the wafer and a holding plate can be smoothly moved in a head member. The abrasive machine comprises: the head member including a concave section, in which the holding plate is accommodated; an elastic sheet member suspending the holding plate and being reinforced by a cloth-formed reinforcing member; a space for storing pressure fluid which pushes the holding plate toward the abrasive plate, the space being formed between the elastic sheet member and the concave section; and a plurality of spherical bodies being provided between an outer circumferential face of the holding plate and an inner circumferential face of the concave section, the spherical bodies simultaneously point-contact the both circumferential faces.

Abstract translation: 在本发明的晶片研磨机中，在研磨晶片的同时可以使晶片的重心和旋转轴对应，并且保持板能够平滑地移动到头部构件中。 所述研磨机包括：所述头部构件包括凹部，所述保持板容纳在所述凹部中; 弹性片构件，其将所述保持板悬挂并由布形加强构件加强; 用于存储将所述保持板向研磨板推动的压力流体的空间，所述空间形成在所述弹性片构件和所述凹部之间; 并且在所述保持板的外周面与所述凹部的内周面之间设置有多个球状体，所述球状体同时与所述两个圆周面进行点接触。