发明申请
- 专利标题: Coriolis effect transducer
- 专利标题(中): 科里奥利效应传感器
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申请号: US10032640申请日: 2001-12-28
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公开(公告)号: US20020083757A1公开(公告)日: 2002-07-04
- 发明人: John Albert Geen
- 申请人: Entire Interest
- 申请人地址: null
- 专利权人: Entire Interest
- 当前专利权人: Entire Interest
- 当前专利权人地址: null
- 主分类号: G01P021/00
- IPC分类号: G01P021/00
摘要:
A method for testing a Coriolis transducer having a mass adapted vibrate along a vibratory direction in a resonant structure and undergo a displacement along a sensitive axis, perpendicular to the vibration, in response to an angular rate about a mutually perpendicular rate sensing axis. In the absence of an angular rate about the rate sensing axis, forces, FTEST VIBRATORY and FTEST SENSITIVE, are applied on the mass along the direction of vibration and along the sensitive axis, respectively, in a predetermined ratio, N. The output VOUT TEST of the transducer is measured in response to the forces, FTEST VIBRATORY and FTEST SENSITIVE. With such method, a known test input angular rate nullIN TEST SIM is simulated, such rate, nullIN TEST SIM, being a known function of a measured characteristic frequency, for example the resonant bandwidth, BW, of the resonant structure. Thus, the proportionality constant KnullVOUT/nullINnullVOUT TEST/nullIN TEST SIM can be calculated without expensive rate table testing. Further, because the test can be performed with a transducer prior to packaging, electronics integrally formed on the same semiconductor wafer of the mechanical transduction structure may be easily trimmed to provide a desired proportionality constant K. The transducer is micromachined with the mechanism used to apply the force, FTEST VIBRATORY, and the mechanism used to apply the force, FTEST SENSITIVE, in proximate regions of the transducer so that they have matched physical and electrical characteristics. Thus, manufacturing variations incurred in the formation of one of the force mechanisms occur to the other one of the force mechanisms with their size ratio being independent of such variations.
公开/授权文献
- US06510745B2 Coriolis effect transducer 公开/授权日:2003-01-28