公开(公告)号：US20020083757A1

公开(公告)日：2002-07-04

申请号：US10032640

申请日：2001-12-28

申请人： Entire Interest

发明人： John Albert Geen

IPC分类号： G01P021/00

CPC分类号： G01F1/8445 ,  G01C19/5719 ,  G01C25/005 ,  G01F25/0007

摘要： A method for testing a Coriolis transducer having a mass adapted vibrate along a vibratory direction in a resonant structure and undergo a displacement along a sensitive axis, perpendicular to the vibration, in response to an angular rate about a mutually perpendicular rate sensing axis. In the absence of an angular rate about the rate sensing axis, forces, FTEST VIBRATORY and FTEST SENSITIVE, are applied on the mass along the direction of vibration and along the sensitive axis, respectively, in a predetermined ratio, N. The output VOUT TEST of the transducer is measured in response to the forces, FTEST VIBRATORY and FTEST SENSITIVE. With such method, a known test input angular rate nullIN TEST SIM is simulated, such rate, nullIN TEST SIM, being a known function of a measured characteristic frequency, for example the resonant bandwidth, BW, of the resonant structure. Thus, the proportionality constant KnullVOUT/nullINnullVOUT TEST/nullIN TEST SIM can be calculated without expensive rate table testing. Further, because the test can be performed with a transducer prior to packaging, electronics integrally formed on the same semiconductor wafer of the mechanical transduction structure may be easily trimmed to provide a desired proportionality constant K. The transducer is micromachined with the mechanism used to apply the force, FTEST VIBRATORY, and the mechanism used to apply the force, FTEST SENSITIVE, in proximate regions of the transducer so that they have matched physical and electrical characteristics. Thus, manufacturing variations incurred in the formation of one of the force mechanisms occur to the other one of the force mechanisms with their size ratio being independent of such variations.

摘要翻译： 一种用于测试质心的科里奥利换能器的方法，所述科里奥利换能器响应于围绕相互垂直的速率感测轴线的角速率，沿着振动方向在谐振结构中振动并且沿垂直于振动的敏感轴进行位移。 在没有关于速率感测轴的角速率的情况下，力FTEST VIBRATORY和FTEST SENSITIVE分别沿着振动方向和沿着敏感轴分别以预定比率N施加在质量上。输出VOUT TEST 的传感器响应于FTEST VIBRATORY和FTEST SENSITIVE的力量来测量。 利用这种方法，模拟已知的测试输入角速度OMEGAIN TEST SIM，这样的速率OMEGAIN TEST SIM是测量的特征频率的已知函数，例如谐振结构的谐振带宽BW。 因此，可以在没有昂贵的速率表测试的情况下计算比例常数K = VOUT / OMEGAIN = VOUT TEST / OMEGAIN TEST SIM。 此外，由于可以在封装之前用换能器进行测试，所以可以容易地修整在机械转导结构的相同半导体晶片上整体形成的电子线以提供期望的比例常数K.换能器用用于应用的机构进行微加工 力，FTEST振动和用于在传感器的邻近区域施加力FTEST SENSITIVE的机制，使其具有匹配的物理和电气特性。 因此，在其中一个力机构的形成中产生的制造变化发生在另一个力机构上，其尺寸比不依赖于这种变化。