Invention Application
- Patent Title: Dram bit lines
- Patent Title (中): 戏剧位线
-
Application No.: US10044307Application Date: 2001-10-26
-
Publication No.: US20020126548A1Publication Date: 2002-09-12
- Inventor: Jerome Ciavatti
- Applicant: STMicroelectronics S.A.
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics S.A.
- Current Assignee: STMicroelectronics S.A.
- Current Assignee Address: FR Montrouge
- Priority: FR00/13854 20001027
- Main IPC: H01L021/8242
- IPC: H01L021/8242

Abstract:
A method for manufacturing a DRAM cell including two active word lines having a drain region and distinct source regions, including, after the forming of insulated conductive lines, the steps of: depositing a first, then a second selectively etchable insulating layers; etching the second insulating layer to only maintain it above conductive lines; depositing and leveling a third insulating layer selectively etchable with respect to at least the second insulating layer; opening the first and third insulating layers to expose the drain region and an insulating trench; filling the previously-formed opening with a conductive material; polishing the entire structure; and depositing a fourth insulating layer, selectively etchable with respect to the third insulating layer.
Public/Granted literature
- US06716715B2 Dram bit lines Public/Granted day:2004-04-06
Information query