发明申请
US20020139682A1 Method and apparatus for avoiding particle accumulation in electrodeposition
有权
用于避免电沉积中的颗粒积聚的方法和装置
- 专利标题: Method and apparatus for avoiding particle accumulation in electrodeposition
- 专利标题(中): 用于避免电沉积中的颗粒积聚的方法和装置
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申请号: US09982558申请日: 2001-10-17
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公开(公告)号: US20020139682A1公开(公告)日: 2002-10-03
- 发明人: Bulent M. Basol , Cyprian Uzoh , Homayoun Talieh
- 主分类号: C25D005/22
- IPC分类号: C25D005/22 ; C25D005/06 ; C25D017/00
摘要:
Systems and methods to remove or lessen the size of metal particles that have formed on, and to limit the rate at which metal particles form or grow on, workpiece surface influencing devices used during electrodeposition are presented. According to an exemplary method, the workpiece surface influencing device is occasionally placed in contact with a conditioning substrate coated with an inert material, and the bias applied to the electrodeposition system is reversed. According to another exemplary method, the workpiece surface influencing device is conditioned using mechanical contact members, such as brushes, and conditioning of the workpiece surface influencing device occurs, for example, through physical brushing of the workpiece surface influencing device with the brushes. According to a further exemplary method, the workpiece surface influencing device is rotated in different direction during electrodeposition.
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