摘要:
The invention relates to the analysis of the performance and properties of electrochemical processes, and specifically, to electrolytic solutions and electrode processes. The invention discloses a device and a method for obtaining qualitative and quantitative information for the kinetics of the electrode reactions, the transport processes, the thermodynamic properties of the electrochemical processes taking place in the cell. When a deposition reaction takes place, the device provides also valuable information about the relationship between the current density and deposit properties including but not limited to the deposit color, luster, and other aspects of its appearance. The device disclosed herein typically is comprised of a multiplicity of cathodic or anodic regions where one or more electrochemical reactions take place simultaneously, but at a different rate. From the precisely measured segmental currents one can obtain among other process properties: (1) An accurate relationship between the deposit appearance and the current density. This relationship can be used for process diagnostics, troubleshooting, control of concentrations, pH, and additives and contaminants and for optimizing the operating conditions, including the voltage, current, and circulation rate. (2) Quantitative determination of important process parameters including but not limited to, kinetics (e.g., exchange current density, cathodic and anodic transfer coefficients), transport (e.g. conductivity), and thermodynamics (e.g., standard potential). A particularly attractive application of the process is for the quantitative and qualitative processes of alloys plating and for the determination of the relationship between the current efficiency and the applied current density.
摘要:
An electroplating system is provided with a rotatable head assembly including a substrate holder to secure a substrate for entry into a bath of electrolyte; and a head tilt mechanism including a stepper motor connected to the rotatable head assembly and configured to control bath entry parameters for optimal surface wetting of the substrate, upon bath entry for electroplating the substrate free of electroplating defects, including, but not limited to, swirl defects.
摘要:
There is provided an electrolytic processing apparatus and method which, while omitting a CMP treatment entirely or reducing a load upon a CMP treatment to the least possible extent, can process a conductive material formed in the surface of a substrate to flatten the material, or can remove (clean) extraneous matter adhering to the surface of a workpiece such as a substrate. The electrolytic processing apparatus includes: a pair of electrodes disposed at a given distance; an ion exchange disposed between the pair of electrodes; and a liquid supply section for supplying a liquid between the pair of electrodes. The electrolytic processing method includes: providing an electrode section having, a pair of electrodes disposed at a given distance with an ion exchanger being interposed: and bringing the electrode into contact with or close to a workpiece while supplying a fluid to the ion exchanger, thereby processing the surface of the workpiece.
摘要:
A plating machine for plating a film carrier tape for mounting electronic parts includes a plating tank for plating wiring patterns of a film carrier tape and also has a bubble adhesion prevention means that is position adjustable with respect to the surface of a plating solution contained in the plating tank. The process for producing film carrier tapes for mounting electronic parts comprises partially immersing a film carrier tape in a plating solution contained in a plating tank and selectively plating wiring patterns formed in the immersed area while adsorbing bubbles generated in the plating solution to a bubble adhesion prevention means arranged at the surface of the plating solution.
摘要:
The present invention provides ion exchangers for an electrical deionization apparatus that can be operated at low voltages by preventing voltage buildup in the electrical deionization apparatus, and an electrical deionization apparatus incorporating said ion exchangers. The present invention provides an ion exchanger for an electrical deionization apparatus, which is to be used as an ion exchanger placed in at least one of a deionization compartment and/or concentration compartment and, which at least partially has a plurality of different functional groups, or which has a graft chain having an ion exchange group on the backbone of an organic polymer substrate and further has a second graft chain on said graft chain, or which has a crosslinked graft chain having an ion exchange group on the backbone of an organic polymer substrate.
摘要:
Embodiments of the invention generally provide a fluid delivery system for an electrochemical plating platform. The fluid delivery system is configured to supply multiple chemistries to multiple plating cells with minimal bubble formation in the fluid delivery system. The system includes a solution mixing system, a fluid distribution manifold in communication with the solution mixing system, a plurality of fluid conduits in fluid communication with the fluid distribution manifold, and a plurality of fluid tanks, each of the plurality of fluid tanks being in fluid communication with at least one of the plurality of fluid conduits.
摘要:
The invention concerns a coating precursor comprising a silicone resin, a metal compound and an organic solvent capable of dissolving said silicone and of suspending said metal compound, said silicone resin and said metal compound being capable of chemically reacting so as to produce a solid layer on a substrate after the organic solvent has evaporated and a cohesive refractory layer after a calcination process. The invention also concerns a method for coating a specific surface of a substrate with at least a refractory silicon-containing layer which consists in coating the substrate with a coating precursor of the invention, so as to form a raw layer and carrying out a heat treatment so as to calcine said raw layer and form a cohesive refractory layer. The invention enables to obtain a protective coating resistant to oxidizing environments, liquid metal or molten salt.
摘要:
An electrochemical cell component having a plate with opposing faces, seal grooves formed in each of the faces, and a plurality of holes extending through the plate between the first and second grooves with an integral sealing member formed in the grooves and holes. The seal grooves extend continuously around the perimeter of the faces and the grooves may follow any type of contiguous pattern. The component may form a frame surrounding a flow field. Bipolar plates and fluid cooled bipolar plates may comprise this electrochemical cell component. Alternatively, a seal groove may be formed in only the first face and a ridge formed in the second face of the component. The ridge may be used to form a fluid tight seal when pressed into an opposing surface of the membrane in a membrane and electrode assembly. A sealing material is contained within the seal groove.
摘要:
Provided is a cup-shaped plating apparatus which can plate the whole area of a plating target surface with a uniform film thickness. In a cup-shaped plating apparatus including a placement portion of an object to be plated which is provided at an opening end of a plating tank, means for supplying a plating solution into the plating tank, a plating solution outlet port which is formed in the plating tank, a cavity portion into which the plating solution which has flown out of the outlet port flows, a plating solution discharge port within the cavity portion, and a collection tank for the plating solution discharged from the discharge port, which subjects the object to be plated to plating treatment while supplying the plating solution into the plating tank, the shape and/or opening area of the discharge port formed on the downstream side of the cavity portion can be changed. If the shape and/or opening area of the discharge port formed on the downstream side of the cavity portion can be adjusted, it is possible to suppress nonuniform plating and variations in plating on a plating target surface by adjusting the shape and/or opening area.
摘要:
A system and method for generating polysulfide includes at least one vessel for containing the pulping liquor, and at least one oxidation promoter element including an oxidation promoter adhered by a coating material to a substrate. The oxidation promoter element may be affixed within the vessel or, alternatively, movable between two or more vessels to facilitate polysulfide generation and/or recovery of the oxidation promoter in at least two vessels.