Invention Application
- Patent Title: Laser ventilation system
- Patent Title (中): 激光通风系统
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Application No.: US10174187Application Date: 2002-06-17
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Publication No.: US20020159207A1Publication Date: 2002-10-31
- Inventor: Kay Zimmerman , Ulrich Rebhan
- Applicant: Lambda Physik AG.
- Applicant Address: null
- Assignee: Lambda Physik AG.
- Current Assignee: Lambda Physik AG.
- Current Assignee Address: null
- Main IPC: H02H003/00
- IPC: H02H003/00

Abstract:
A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.
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