公开(公告)号：US20030210715A1

公开(公告)日：2003-11-13

申请号：US10354945

申请日：2003-01-29

Applicant: Lambda Physik AG.

Inventor： Peter Lokai ,  Thomas Schroeder ,  Juergen Kleinschmidt ,  Uwe Stamm ,  Klaus Wolfgang Vogler

IPC: H01S003/10 ,  H01S003/22 ,  H01S003/223 ,  H01S003/08

CPC classification number: H01S3/225 ,  H01S3/1392

Abstract: A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

公开(公告)号：US20030058429A1

公开(公告)日：2003-03-27

申请号：US10218690

申请日：2002-08-12

Applicant: Lambda Physik AG

Inventor： Guido Schriever

IPC: G03B001/00

CPC classification number: B82Y10/00 ,  G01J1/429 ,  G03F7/70033 ,  G03F7/70558 ,  H01L31/02161 ,  H01L31/02162 ,  H01L31/02325 ,  H01L31/1037 ,  H01L31/108

Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.

Abstract translation: 用于发射约11-15nm的EUV光子源的检测器包括用于沿着光路反射光束的至少一个多层反射镜，包括检测器元件，用于减小光束的带宽的滤波器和检测器元件。 检测器元件优选地包括具有掺杂死区和零表面复合的Si pn二极管或用于增加检测器的长期稳定性的PtSi-nSi屏障。

公开(公告)号：US20020159207A1

公开(公告)日：2002-10-31

申请号：US10174187

申请日：2002-06-17

Applicant: Lambda Physik AG.

Inventor： Kay Zimmerman ,  Ulrich Rebhan

IPC: H02H003/00

CPC classification number: F24F7/00 ,  B23K26/1435 ,  B23K26/1438

Abstract: A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.

Abstract translation: 公开了用于工业激光系统的通风系统，其可以使正常操作期间所需的冷却空气进入最小化。 即使外壳打开，仍保持足够的通风。 各种传感器监测冷却空气的状况，如果冷却或安全需要，可以增加进气口。 这种通风系统对于微光刻应用中的激光器激光器具有特别的优点，因为经过激光装置的实际需要来控制空气净化室空气的消耗。

公开(公告)号：US20020031160A1

公开(公告)日：2002-03-14

申请号：US09922222

申请日：2001-08-01

Applicant: Lambda Physik AG

Inventor： Rainer Desor

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/0975

Abstract: Method and system provide a variable delay between the external trigger pulse for a laser system and the light pulse such that the total delay is maintained at a substantially constant level and the overall delay between the external trigger pulse of the laser system and the light pulse is not effected by the HV, temperature change or other parameters such as material properties. The variable delay may be implemented with digital delay lines.

Abstract translation: 方法和系统提供激光系统的外部触发脉冲与光脉冲之间的可变延迟，使得总延迟保持在基本上恒定的水平，并且激光系统的外部触发脉冲与光脉冲之间的总体延迟是 不受HV，温度变化或其他参数如材料性能的影响。 可以用数字延迟线实现可变延迟。

公开(公告)号：US20020021729A1

公开(公告)日：2002-02-21

申请号：US09923770

申请日：2001-08-06

Applicant: Lambda Physik AG

Inventor： Klaus Vogler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/223 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/22 ,  H01S3/2258

Abstract: A molecular fluorine (F2) laser system includes a seed oscillator and power amplifier. The seed oscillator includes a laser tube including multiple electrodes therein which are connected to a discharge circuit. The laser tube is part of an optical resonator for generating a laser beam including a first line of multiple characteristic emission lines around 157 nm. The laser tube is filled with a gas mixture including molecular fluorine and a buffer gas. A low pressure seed radiation generating gas lamp is alternatively used. The gas mixture is at a pressure below that which results in the generation of a laser emission including the first line around 157 nm having a natural linewidth of less than 0.5 pm. The power amplifier amplifies the power of the beam emitted by the seed oscillator to a desired power for applications processing.

Abstract translation: 分子氟（F2）激光系统包括种子振荡器和功率放大器。 种子振荡器包括连接到放电电路的包括多个电极的激光管。 激光管是用于产生激光束的光学谐振器的一部分，该激光束包括大约157nm的多个特征发射线的第一线。 激光管中填充有分子氟和缓冲气体的气体混合物。 替代地使用低压种子辐射产生气体灯。 气体混合物的压力低于导致产生包括具有小于0.5μm的自然线宽的157nm附近的第一线的激光发射的压力。 功率放大器将由种子振荡器发射的光束的功率放大到期望的功率以进行应用处理。

公开(公告)号：US20020122452A1

公开(公告)日：2002-09-05

申请号：US10098258

申请日：2002-03-15

Applicant: Lambda Physik AG.,

Inventor： Juergen Kleinschmidt ,  Peter Lokai

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/08068 ,  H01S3/0805 ,  H01S3/105 ,  H01S3/225

Abstract: An excimer or molecular fluorine laser includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber connected to a power supply circuit for energizing the gas mixture, and a resonator including the discharge chamber and a pair of resonator reflectors for generating an output laser beam. One of the resonator reflectors is an output coupling interferometer including a pair of opposing reflecting surfaces tuned to produce a reflectivity maximum at a selected wavelength for narrowing a linewidth of the output laser beam. One of the pair of opposing reflecting surfaces is configured such that the opposing reflecting surfaces of the interferometer have a varying optical distance therebetween over an incident beam cross-section which serves to suppress outer portions of the reflectivity maximum to reduce spectral purity. Preferably, this surface is non-planar, and may include a step, a recess or a raised or recessed curved portion of a quarter wavelength in height or depth, respectively.

公开(公告)号：US20020075932A1

公开(公告)日：2002-06-20

申请号：US10077327

申请日：2002-02-15

Applicant: Lambda Physik AG.

Inventor： Uwe Stamm

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/137 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser includes a gain medium surrounded by a resonator and including a line-narrowing module preferably including a prism beam expander and one or more etalons and/or a grating or grism within the resonator. The material of transmissive portions of the line-narrowing module including the prisms and the plates of the etalons comprises a material having an absorption coefficient of less than 5null10null3/cm at 248 nm incident radiation, less than 10null10null3/cm at 193 nm incident radiation, and less than 0.1/cm at 157 nm. Preferably the material also has a thermal conductivity greater than 2.0 W/mnull C.

Abstract translation: 准分子或分子氟激光器包括由谐振器包围的增益介质，并且包括在谐振器内优选地包括棱镜束扩展器和一个或多个标准具和/或光栅或棱镜的线条变窄模块。 包括棱镜和标准具的板的线变窄模块的透射部分的材料包括在248nm入射辐射下吸收系数小于5×10 -3 / cm的材料，在193处小于10×10 -3 / cm nm入射辐射，在157nm处小于0.1 / cm。 优选地，该材料还具有大于2.0W / m℃的热导率。

公开(公告)号：US20020041614A1

公开(公告)日：2002-04-11

申请号：US09965498

申请日：2001-09-26

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Klaus Wolfgang Vogler ,  Frank Voss ,  Rainer Patzel

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/05 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

公开(公告)号：US20020031161A1

公开(公告)日：2002-03-14

申请号：US09923632

申请日：2001-08-06

Applicant: Lambda Physik AG

Inventor： Hans-Stephan Albrecht ,  Peter Heist ,  Klaus Wolfgang Vogler

IPC: H01S003/098

CPC classification number: H01S3/08036 ,  H01S3/08 ,  H01S3/08081 ,  H01S3/1305 ,  H01S3/139 ,  H01S3/225

Abstract: An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

公开(公告)号：US20020018506A1

公开(公告)日：2002-02-14

申请号：US09883127

申请日：2001-06-15

Applicant: Lambda Physik AG

Inventor： Klaus Vogler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/08004 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/134 ,  H01S3/2258 ,  H01S2301/02

Abstract: A molecular fluorine laser system emitting a narrow bandwidth laser beam and having efficient line-selection of a main line null1 of multiple closely-spaced lines around 157 nm includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, a gas handling module for periodically replenishing the molecular fluorine in the discharge chamber for maintaining said gas mixture at a selected composition, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam around 157 nm. The resonator further includes line-selection optics for selecting a main line null1 and suppressing a secondary line null2 of said plurality of closely-spaced lines. The line-selection optics include a line-selection package on the opposite of an output coupling side of the chamber and/or a solid element on the outcoupling side of the chamber having an interference maximum at the main line and an interference minimum at the secondary line. A contrast ratio of the main line to the secondary line in the laser beam is at least 100. The laser system further includes an enclosure maintained substantially free of VUV photoabsorbing species wherein the laser beam propagates within the enclosure between the resonator and an application process.

Abstract translation: 发射窄带宽激光束并且对157nm附近的多个紧密间隔的线的主线lambd1的有效线选择的分子氟激光系统包括：填充有包括分子氟和缓冲气体的激光气体的放电室，气体 处理模块，用于周期性地补充放电室中的分子氟以将所述气体混合物保持在所选择的组成，放电室内的多个电极并连接到用于激发分子氟的放电电路，以及包括用于产生 激光束约157nm。 谐振器还包括用于选择主线lambd1并抑制所述多个紧密间隔线的次级线lambd2的线选择光学器件。 线路选择光学器件包括在腔室的输出耦合侧相对的线选择包和/或腔室的输出耦合侧上的固体元件，其在主线处具有干扰最大值，并且在次级线路处具有干扰最小值 线。 激光束中主线与次级线的对比度至少为100.激光系统还包括基本上不含VUV光吸收物质的外壳，其中激光束在谐振器和应用过程之间的外壳内传播。