发明申请
- 专利标题： Carrier head with a compressible film
- 专利标题（中）： 承载头与可压缩胶片
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申请号： US10187143申请日： 2002-06-28
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公开(公告)号： US20020164938A1公开(公告)日： 2002-11-07
- 发明人: Hung Chih Chen , Steven M. Zuniga
- 申请人： Applied Materials, Inc., a Delaware corporation
- 申请人地址： null
- 专利权人： Applied Materials, Inc., a Delaware corporation
- 当前专利权人： Applied Materials, Inc., a Delaware corporation
- 当前专利权人地址： null
- 主分类号： B24B005/00
- IPC分类号： B24B005/00 ; B24B029/00 ; B24B047/02 ; B24B041/06
摘要：
A compressible film that is detachably securable to a surface of a rigid structure in the carrier head. The compressible film has a plurality of apertures positioned to create a non-uniform pressure distribution on a substrate during polishing so as to improve polishing uniformity. The apertures may be spaced and positioned to provide a pressure distribution on the substrate that is locally uniform but globally non-uniform.
公开/授权文献
- US07001260B2 Carrier head with a compressible film 公开/授权日：2006-02-21
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